diff --git a/clang/lib/Driver/Tools.cpp b/clang/lib/Driver/Tools.cpp
index 8fc34ab05a0f..18c917c55a41 100644
--- a/clang/lib/Driver/Tools.cpp
+++ b/clang/lib/Driver/Tools.cpp
@@ -4900,14 +4900,20 @@ void Clang::ConstructJob(Compilation &C, const JobAction &JA,
   if (Args.hasFlag(options::OPT_fxray_instrument,
                    options::OPT_fnoxray_instrument, false)) {
     const char *const XRayInstrumentOption = "-fxray-instrument";
-    if (Triple.getOS() == llvm::Triple::Linux &&
-        (Triple.getArch() == llvm::Triple::arm ||
-         Triple.getArch() == llvm::Triple::x86_64)) {
-      // Supported.
-    } else {
+    if (Triple.getOS() == llvm::Triple::Linux)
+      switch (Triple.getArch()) {
+      case llvm::Triple::x86_64:
+      case llvm::Triple::arm:
+      case llvm::Triple::aarch64:
+        // Supported.
+        break;
+      default:
+        D.Diag(diag::err_drv_clang_unsupported)
+            << (std::string(XRayInstrumentOption) + " on " + Triple.str());
+      }
+    else
       D.Diag(diag::err_drv_clang_unsupported)
-          << (std::string(XRayInstrumentOption) + " on " + Triple.str());
-    }
+          << (std::string(XRayInstrumentOption) + " on non-Linux target OS");
     CmdArgs.push_back(XRayInstrumentOption);
     if (const Arg *A =
             Args.getLastArg(options::OPT_fxray_instruction_threshold_,
diff --git a/clang/test/Driver/XRay/xray-instrument-cpu.c b/clang/test/Driver/XRay/xray-instrument-cpu.c
index a686377d287c..613342063a40 100644
--- a/clang/test/Driver/XRay/xray-instrument-cpu.c
+++ b/clang/test/Driver/XRay/xray-instrument-cpu.c
@@ -1,4 +1,4 @@
 // RUN: not %clang -o /dev/null -v -fxray-instrument -c %s
-// XFAIL: amd64-, x86_64-, x86_64h-, arm
+// XFAIL: amd64-, x86_64-, x86_64h-, arm, aarch64, arm64
 // REQUIRES: linux
 typedef int a;
diff --git a/clang/test/Driver/XRay/xray-instrument-os.c b/clang/test/Driver/XRay/xray-instrument-os.c
index 3b9920309041..86b109b6dbfe 100644
--- a/clang/test/Driver/XRay/xray-instrument-os.c
+++ b/clang/test/Driver/XRay/xray-instrument-os.c
@@ -1,4 +1,4 @@
 // RUN: not %clang -o /dev/null -v -fxray-instrument -c %s
 // XFAIL: -linux-
-// REQUIRES-ANY: amd64, x86_64, x86_64h, arm
+// REQUIRES-ANY: amd64, x86_64, x86_64h, arm, aarch64, arm64
 typedef int a;