diff --git a/cmake/Modules/GenerateBinaryHeader.cmake b/cmake/Modules/GenerateBinaryHeader.cmake
index 512f69e09d..498a4f68f5 100644
--- a/cmake/Modules/GenerateBinaryHeader.cmake
+++ b/cmake/Modules/GenerateBinaryHeader.cmake
@@ -1,3 +1,3 @@
 # utility script to call GenerateBinaryHeader function
 include(${SOURCE_DIR}/Modules/LAMMPSUtils.cmake)
-GenerateBinaryHeader(${VARNAME} ${HEADER_FILE} ${SOURCE_FILES})
+GenerateBinaryHeader(${VARNAME} ${HEADER_FILE} ${SOURCE_FILE})
diff --git a/cmake/Modules/LAMMPSUtils.cmake b/cmake/Modules/LAMMPSUtils.cmake
index a87c0f567c..339ba867bd 100644
--- a/cmake/Modules/LAMMPSUtils.cmake
+++ b/cmake/Modules/LAMMPSUtils.cmake
@@ -71,19 +71,15 @@ macro(pkg_depends PKG1 PKG2)
 endmacro()
 
 # CMake-only replacement for bin2c and xxd
-function(GenerateBinaryHeader varname outfile files)
+function(GenerateBinaryHeader varname outfile infile)
     message("Creating ${outfile}...")
     file(WRITE ${outfile} "// CMake generated file\n")
-    math(EXPR ARG_END   "${ARGC}-1")
 
-    foreach(IDX RANGE 2 ${ARG_END})
-        list(GET ARGV ${IDX} filename)
-        file(READ ${filename} content HEX)
-        string(REGEX REPLACE "([0-9a-f][0-9a-f])" "0x\\1," content "${content}")
-        string(REGEX REPLACE ",$" "" content "${content}")
-        file(APPEND ${outfile} "const unsigned char ${varname}[] = { ${content} };\n")
-        file(APPEND ${outfile} "const unsigned int ${varname}_size = sizeof(${varname});\n")
-    endforeach()
+    file(READ ${infile} content HEX)
+    string(REGEX REPLACE "([0-9a-f][0-9a-f])" "0x\\1," content "${content}")
+    string(REGEX REPLACE ",$" "" content "${content}")
+    file(APPEND ${outfile} "const unsigned char ${varname}[] = { ${content} };\n")
+    file(APPEND ${outfile} "const unsigned int ${varname}_size = sizeof(${varname});\n")
 endfunction(GenerateBinaryHeader)
 
 # fetch missing potential files
diff --git a/cmake/Modules/Packages/GPU.cmake b/cmake/Modules/Packages/GPU.cmake
index ac2c975da3..cad6e2bf9a 100644
--- a/cmake/Modules/Packages/GPU.cmake
+++ b/cmake/Modules/Packages/GPU.cmake
@@ -309,7 +309,7 @@ elseif(GPU_API STREQUAL "HIP")
     endif()
 
     add_custom_command(OUTPUT ${CUBIN_H_FILE}
-      COMMAND ${CMAKE_COMMAND} -D SOURCE_DIR=${CMAKE_CURRENT_SOURCE_DIR} -D VARNAME=${CU_NAME} -D HEADER_FILE=${CUBIN_H_FILE} -D SOURCE_FILES=${CUBIN_FILE} -P ${CMAKE_CURRENT_SOURCE_DIR}/Modules/GenerateBinaryHeader.cmake
+      COMMAND ${CMAKE_COMMAND} -D SOURCE_DIR=${CMAKE_CURRENT_SOURCE_DIR} -D VARNAME=${CU_NAME} -D HEADER_FILE=${CUBIN_H_FILE} -D SOURCE_FILE=${CUBIN_FILE} -P ${CMAKE_CURRENT_SOURCE_DIR}/Modules/GenerateBinaryHeader.cmake
       DEPENDS ${CUBIN_FILE}
       COMMENT "Generating ${CU_NAME}_cubin.h")